| Authors: | A. Subramanian, P. Neutens, A. Dhakal, R. Jansen, T. Claes, X. Rottenberg, F. Peyskens, S. Selvaraja, P. Helin, B. Du Bois, K. Leyssens, S. Severi, P. Deshpande, R. Baets, P. Van Dorpe | | Title: | Low-loss singlemode PECVD silicon nitride photonic wire waveguides for 532-900 nm wavelength window fabricated within a CMOS pilot line | | Format: | International Journal | | Publication date: | 10/2013 | | Journal/Conference/Book: | IEEE Photonics Journal
| | Volume(Issue): | 5(6) p.2202809 | | DOI: | 10.1109/jphot.2013.2292698 | | Citations: | 229 (Dimensions.ai - last update: 24/11/2024)
189 (OpenCitations - last update: 27/6/2024)
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Abstract
PECVD silicon nitride photonic wire waveguides have been fabricated in a CMOS pilot line. Both clad and unclad single mode wire waveguides were measured at λ=532 nm, 780 nm and 900 nm respectively. The dependence of loss on wire width, wavelength and cladding is discussed in detail. Cladded multimode and singlemode waveguides show a loss well below 1 dB/cm in the 532-900 nm wavelength range. For singlemode unclad waveguides losses < 1 dB/cm was achieved at λ=900 nm whereas losses were measured in the range of 1-3 dB/cm for λ=780 and 532 nm respectively. Related Research Topics
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