| Authors: | Peter Verheyen, Guy Lepage, J Van Campenhout, M. Pantouvaki, Philippe Absil, P. De Heyn, W. Bogaerts, P. Dumon, S. Selvaraja | | Title: | Co-integration of Ge detectors and Si modulators in an advanced Si photonics platform | | Format: | International Conference Proceedings | | Publication date: | 4/2012 | | Journal/Conference/Book: | SPIE Photonics Europe 2012
| | Editor/Publisher: | SPIE , | | Volume(Issue): | 8431 p.paper 39 | | Location: | Brussels, Belgium | | DOI: | 10.1117/12.921747 | | Citations: | 9 (Dimensions.ai - last update: 24/11/2024)
5 (OpenCitations - last update: 10/5/2024)
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Abstract
A Si photonics platform is described, co-integrating advanced passive components with Si modulators and Ge detectors. This platform is developed on a 200mm CMOS toolset, compatible with a 130nm CMOS baseline. The paper describes the process flow, and describes the performance of selected electro-optical devices to demonstrate the viability of the flow. Related Research Topics
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