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Authors: C. Cummins, B. Pan, G. Roelkens, M. Dahlem, S. Saseendran, P. Helin Title: Material characterisation of LPCVD SiN and understanding loss behavior Format: International Conference Proceedings Publication date: 6/2023 Journal/Conference/Book: Conference on Lasers and Electro-Optics Europe Volume(Issue): p.16 Online: https://opg.optica.org/abstract.cfm?uri=CLEO_Europe-2023-ce_p_16 Citations: Look up on Google Scholar Download: (443KB)