K.B. Gylfason, P. Edinger, G. Jo, C.P.V. Nguyen, A.Y. Takabayashi, C. Errando-Herranz, C. Antony, G. Talli, P. Verheyen, U. Khan, S.J. Bleiker, W. Bogaerts, N. Quack, F. Niklaus
Title:
Wafer-Level Vacuum-Sealed Low-Power Photonic MEMS for High Density Silicon Photonic Circuits
