Authors:	I. Ansari, J. George, G.F Feutmba, J. Beeckman , D. Van Thourhout
Title:	Acousto-optic modulation in a Si-waveguide
Format:	International Conference Proceedings
Publication date:	12/2021
Journal/Conference/Book:	IEEE International Conference on Group IV Photonics
Volume(Issue):	p.paper TuC2 (2 pages)
DOI:	10.1109/GFP51802.2021.9673971
Citations:	2 (Dimensions.ai - last update: 24/11/2024) 1 (OpenCitations - last update: 21/10/2024) Look up on Google Scholar
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Abstract

We demonstrate acousto-optic modulation (VπL∼3.6 Vcm) in a Si waveguide circuit by integrating a photonic compatible PZT film on the SOI chip. We then fabricated a small footprint inter-digital transducer (IDT) on the film to piezoelectrically actuate acoustic waves at GHz frequencies.

Related Research Topics

• MEMS and NEMS optical actuators in SOI

Related Projects

• FET-PROACTIVE: HOT (Hybrid Optomechanical Technologies)
• BOF GOA: PZT (Integration of novel thin films with photonic circuits for telecom, quantum optics and neuromorphic computing)