Authors:	M. Hsu, A. Marinelli, C. Merckling, M. Pantouvaki, J. Van Campenhout, P. Absil, D. Van Thourhout
Title:	Orientation-dependent electro-optical response of BaTiO3 on SrTiO3-buffered Si(001) studied via spectroscopic ellipsometry
Format:	International Journal
Publication date:	6/2017
Journal/Conference/Book:	Optical Materials Express
Editor/Publisher:	OSA,
Volume(Issue):	7(6) p.291887
DOI:	10.1364/OME.7.002030
Citations:	20 (Dimensions.ai - last update: 24/11/2024) 18 (OpenCitations - last update: 27/6/2024) Look up on Google Scholar
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Abstract

To design a high performance BaTiO3 (BTO)-integrated Si modulator, understanding how BTO domain orientations influence its electro-optical (EO) properties is crucial. The 100-nm-thick BTO films with c-oriented and a-oriented domains are obtained by exploiting various thickness of SrTiO3 buffer layers grown on Si(001) substrates. Then, the electro-optical behavior for 2 differently oriented samples is analyzed using spectroscopic ellipsometry.