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Authors: S. Dwivedi, T. Van Vaerenbergh, A. Ruocco, T. Spuesens, P. Bienstman, P. Dumon, W. Bogaerts
Title: Measurements of Effective Refractive Index of SOI Waveguides using Interferometers
Format: International Conference Proceedings
Publication date: 6/2015
Journal/Conference/Book: Integrated Photonics Research, Silicon and Nano Photonics (IPR 2015)
Volume(Issue): p.IM2A.6
Location: Boston, United States
DOI: 10.1364/iprsn.2015.im2a.6
Citations: 10 (Dimensions.ai - last update: 24/11/2024)
4 (OpenCitations - last update: 27/6/2024)
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Abstract

We demonstrate an accurate method of measuring the effective refractive index of SOI waveguides in the C-band using three Mach-Zehnder Interferometers. Over wafer the average extraction error of effective index and group index is 0.003 and 0.004.

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