| Authors: | W. Xie, D. Van Thourhout | | Title: | High-Q Free-standing Silicon Nitride Microdisk Vertically Coupled with On-chip Waveguide | | Format: | International Conference Proceedings | | Publication date: | 6/2014 | | Journal/Conference/Book: | CLEO 2014
| | Editor/Publisher: | Optical Society of America, | | Location: | San Jose, United States | | DOI: | 10.1364/CLEO_SI.2014.STu3M.3 | | Citations: | Look up on Google Scholar
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Abstract
We designed and fabricated silicon nitride microdisk-waveguide vertical coupling devices processed at a low temperature of 270°. We experimentally demonstrate an intrinsic quality factor of 72000 in the disk with only 15ìm radius operating near 1310nm. Related Research Topics
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