| Authors: | A. Masood, M. Pantouvaki, G. Lepage, P. Verheyen, J. Van Campenhout, P. Absil, D. Van Thourhout, W. Bogaerts | | Title: | Comparison of heater architectures for thermal control of silicon photonic circuits | | Format: | International Conference Proceedings | | Publication date: | 8/2013 | | Journal/Conference/Book: | Group IV Photonics
| | Editor/Publisher: | IEEE, | | Volume(Issue): | p.ThC2 | | Location: | Seoul, South Korea | | DOI: | 10.1109/group4.2013.6644437 | | Citations: | 95 (Dimensions.ai - last update: 24/11/2024)
23 (OpenCitations - last update: 10/5/2024)
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Abstract
We present a comparison of integrated heaters for
silicon photonics, based on doped silicon, silicide and tungsten metallization, with and without trenches and undercut for insulation. Results show similar thermo-optic efficiency, but with electrical resistivities spanning 2 orders of magnitude. Related Research Topics
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