Authors:	G. Yurtsever, K. Komorowska, R. Baets
Title:	Low Dispersion Integrated Michelson Interferometer on Silicon on Insulator for Optical Coherence Tomography
Format:	International Conference Proceedings
Publication date:	9/2011
Journal/Conference/Book:	Conference on Optical Coherence Tomography and Coherence Techniques V
Editor/Publisher:	Proceedings of SPIE-OSA Biomedical Optics,
Volume(Issue):	8091(80910T)
Location:	Munich, Germany
DOI:	10.1117/12.889920
Citations:	11 (Dimensions.ai - last update: 24/11/2024) 6 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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Abstract

We present an integrated silicon Michelson interferometer for OCT fabricated with wafer scale deep UV lithography. Silicon
waveguides of the interferometer are designed with GVD less than 50 ps/nm.km. The footprint of the device is 0.5mm x 3mm. The effect of sidewall roughness of silicon waveguides has been observed, possible solutions are discussed.

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