Abstract
We present measurement results of an ultracompact 4-channel silicon-on-insulator planar concave grating (PCG) demultiplexer fabricated in a complimentary metal-oxide semiconductor (CMOS)-line using deep-ultraviolet lithography. The demultiplexer has 4 output channels separated by 20nm and a footprint of only 280ƒÊm ~ 150ƒÊm. The crosstalk is better than -25dB and the on-chip loss is drastically reduced down to 1.9dB by replacing each facet by a second order Bragg reflector. Related Research Topics
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