Authors:	W.C.L. Hopman, A.J.F. Hollinck, R.M. de Ridder, K.O. van der Werf, V. Subramamiam, W. Bogaerts
Title:	Nano-mechanical tuning and imaging of a photonic crystal micro-cavity resonance
Format:	International Journal
Publication date:	9/2006
Journal/Conference/Book:	Optics Express
Volume(Issue):	14(19) p.8745-8752
DOI:	10.1364/oe.14.008745
Citations:	54 (Dimensions.ai - last update: 24/11/2024) 45 (OpenCitations - last update: 3/5/2024) Look up on Google Scholar
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Abstract

We show that nano-mechanical interaction using atomic force microscopy (AFM) can be used to map out mode-patterns of an optical micro-resonator with high spatial accuracy. Furthermore we demonstrate how the Q-factor and center wavelength of such resonances can be
sensitively modified by both horizontal and vertical displacement of an AFM tip consisting of either Si3N4 or Si material. With a silicon tip we are able to tune the resonance wavelength by 2.3 nm, and to set Q between values of 615 and zero, by expedient positioning of the AFM tip. We find full on/off switching for less than 100 nm vertical, and for 500 nm lateral displacement at the strongest resonance antinode locations.

Related Research Topics

• Silicon (nano)photonic devices fabrication with 193nm and 248nm (DUV) Optical lithography (1999-2012)

Related Projects

• IST: ePIXnet (European Network of Excellence on Photonic Integrated Components and Circuits)