Authors:	P. Dumon, W. Bogaerts, D. Van Thourhout, V. Wiaux, J. Wouters, S. Beckx, R. Baets
Title:	WDM filters in Silicon-on-insulator photonic wires
Format:	National Conference Poster
Publication date:	12/2004
Journal/Conference/Book:	Doctoraatssymposium Faculteit Toegepaste Wetenschappen
Editor/Publisher:	Universiteit Gent,
Location:	Gent, Belgium
Citations:	Look up on Google Scholar
Download:	(485KB)

Abstract

We demonstrate compact integrated optical wavelength filters in Silicon-on-insulator nanophotonic waveguides. These filters can be used for wavelength division multiplexing in the infrared telecommunication wavelength range. The structures are fabricated in a CMOS line using deep UV lithography and dry etching techniques. We fabricated ring resonators with 8$\mu$m radius showing sharp resonances, an 8-channel arrayed waveguide grating with a footprint of about 0.1mm^2 but still high crosstalk between channels, and 5-stage cascaded Mach-Zehnder filters with high drop efficiency and -10dB crosstalk level.

Related Research Topics

• Silicon (nano)photonic devices fabrication with 193nm and 248nm (DUV) Optical lithography (1999-2012)
• WDM components

Related Projects

• IST: PICCO (Photonic Integrated Circuits using photonic Crystal Optics)
• IAP-V: PHOTON (Photons and Photonics : from basic physics to system concepts)
• IST: PICMOS (Photonic Interconnect Layer on CMOS by wafer-scale integration)
• IST: ePIXnet (European Network of Excellence on Photonic Integrated Components and Circuits)