| Authors: | W. Bogaerts, P. Dumon, V. Wiaux, J. Wouters, S. Beckx, D. Taillaert, B. Luyssaert, J. Van Campenhout, D. Van Thourhout, R. Baets | | Title: | Nanophotonic waveguides in Silicon-on-Insulator Fabricated with CMOS Technology | | Format: | National Conference Poster | | Publication date: | 12/2003 | | Journal/Conference/Book: | 1st Flanders Engineering PhD Symposium
| | Volume(Issue): | p.63 | | Location: | Brussel, Belgium | | Citations: | Look up on Google Scholar
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Abstract
We have made nanophotonic waveguides with low propagation losses in Silicon-on-insulator. The structures were fabricated with advanced CMOS fabrication technology including deep UV lithography at 248nm. We demonstrate photonic crystal waveguides with losses of 10dB/mm and single-mode photonic wires with propagation losses as low as 2.4dB/cm. We used these waveguides to construct compact racetrack and resonators in these waveguides with a Q of up to 8000. Related Research Topics
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