Authors:	P. Dumon, W. Bogaerts, J. Van Campenhout, V. Wiaux, J. Wouters, S. Beckx, R. Baets
Title:	Low-loss photonic wires and compact ring resonators in silicon-on-insulator
Format:	International Conference Proceedings
Publication date:	11/2003
Journal/Conference/Book:	LEOS Benelux Annual Symposium 2003
Location:	Enschede, Netherlands
Citations:	Look up on Google Scholar
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Abstract

We demonstrate low-loss, single-mode photonic wires in silicon-on-insulator as an enabling technology for future dense photonic integrated circuits. These waveguides are defined with 248nm deep UV lithography and have losses as low as 2.4dB/cm for a width of 500nm at 1550nm wavelength. Bends and directional couplers are fabricated and used to build ring resonators with 5?m radius, Q-factors higher than 3000 and insertion loss of around 2dB. The experimental results show clear agreement with a theoretical model of the resonators. We analyze the fabrication tolerances allowed for these resonators to be suitable as a building block for WDM filtering components.

Related Research Topics

• Silicon (nano)photonic devices fabrication with 193nm and 248nm (DUV) Optical lithography (1999-2012)
• Low-loss Nanophotonic waveguides (1999-2010)
• Microring resonators (2000-2004)
• WDM components

Related Projects

• IST: PICCO (Photonic Integrated Circuits using photonic Crystal Optics)
• IAP-V: PHOTON (Photons and Photonics : from basic physics to system concepts)