Authors: | W. Bogaerts, V. Wiaux, D. Taillaert, S. Beckx, R. Baets |
Title: | SOI Photonic Crystal components fabricated with deep UV lithography |
Format: | International Workshop |
Publication date: | 10/2002 |
Journal/Conference/Book: | PECS-IV
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Volume(Issue): | p.40 |
Location: | Los Angeles, United States |
Citations: | Look up on Google Scholar
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Download: |
(244KB) |